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Low energy argon ion-enhanced removal of carbon from silicon dioxide surfaces with atomic deuterium
Low energy argon ion-enhanced removal of carbon from silicon dioxide surfaces with atomic deuterium
Low energy argon ion-enhanced removal of carbon from silicon dioxide surfaces with atomic deuterium
Sampson, G.M. (author) / White, J.M. (author) / Ekerdt, J.G. (author)
APPLIED SURFACE SCIENCE ; 143 ; 30-38
1999-01-01
9 pages
Article (Journal)
English
DDC:
621.35
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