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Nanoindentation of a 10 nm thick thin film

Sawa, T. / Akiyama, Y. / Shimamoto, A. / Tanaka, K.

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Nanoindentation of a 10 nm thick thin film

Sawa, T. / Akiyama, Y. / Shimamoto, A. / Tanaka, K.

Nanoindentation of a 10 nm thick thin film

Sawa, T. / Akiyama, Y. / Shimamoto, A. / Tanaka, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nanoindentation of a 10 nm thick thin film

Contributors:

Sawa, T. (author) / Akiyama, Y. (author) / Shimamoto, A. (author) / Tanaka, K. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 2228-2232

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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