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Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
Williams, J. S. (author) / Chen, Y. (author) / Wong-Leung, J. (author) / Kerr, A. (author) / Swain, M. V. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 2338-2343
1999-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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