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Preparation on ZnO Film by Atomic Layer Deposition

Kobayashi, K. / Okudaira, S. / Ishida, Y.

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Preparation on ZnO Film by Atomic Layer Deposition

Kobayashi, K. / Okudaira, S. / Ishida, Y.

Preparation on ZnO Film by Atomic Layer Deposition

Kobayashi, K. / Okudaira, S. / Ishida, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation on ZnO Film by Atomic Layer Deposition

Contributors:

Kobayashi, K. (author) / Okudaira, S. (author) / Ishida, Y. (author) / Mizutani, N. / Shinozaki, K. / Kamehara, N. / Kimura, T.

Published in:

Electroceramics in Japan II: The 18th Electronics Division Meeting of the Ceramic Society of Japan, Kawasaki, Japan, October 1998 ; 159-162

KEY ENGINEERING MATERIALS

Publication date:

1999-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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