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Structure Control of Polycrystalline Silicon Films on Glass Substrates and Their Properties

Kamiya, T. / Nakahata, K. / Ro, K. / Tohti, J. / Fortmann, C. M. / Shimizu, I.

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Structure Control of Polycrystalline Silicon Films on Glass Substrates and Their Properties

Kamiya, T. / Nakahata, K. / Ro, K. / Tohti, J. / Fortmann, C. M. / Shimizu, I.

Structure Control of Polycrystalline Silicon Films on Glass Substrates and Their Properties

Kamiya, T. / Nakahata, K. / Ro, K. / Tohti, J. / Fortmann, C. M. / Shimizu, I.

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Document information

Title:

Structure Control of Polycrystalline Silicon Films on Glass Substrates and Their Properties

Contributors:

Kamiya, T. (author) / Nakahata, K. (author) / Ro, K. (author) / Tohti, J. (author) / Fortmann, C. M. (author) / Shimizu, I. (author) / Mizutani, N. / Shinozaki, K. / Kamehara, N. / Kimura, T.

Published in:

Electroceramics in Japan II: The 18th Electronics Division Meeting of the Ceramic Society of Japan, Kawasaki, Japan, October 1998 ; 171-174

KEY ENGINEERING MATERIALS

Publication date:

1999-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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