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Smooth GaN surfaces by photoinduced electro-chemical etching

Rotter, T. / Aderhold, J. / Mistele, D. / Semchinova, O. / Stemmer, J. / Uffmann, D. / Graul, J.

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Smooth GaN surfaces by photoinduced electro-chemical etching

Rotter, T. / Aderhold, J. / Mistele, D. / Semchinova, O. / Stemmer, J. / Uffmann, D. / Graul, J.

Smooth GaN surfaces by photoinduced electro-chemical etching

Rotter, T. / Aderhold, J. / Mistele, D. / Semchinova, O. / Stemmer, J. / Uffmann, D. / Graul, J.

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Check availability in my library

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Document information

Title:

Smooth GaN surfaces by photoinduced electro-chemical etching

Contributors:

Rotter, T. (author) / Aderhold, J. (author) / Mistele, D. (author) / Semchinova, O. (author) / Stemmer, J. (author) / Uffmann, D. (author) / Graul, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 59 ; 350 - 354

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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