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Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode

Reichert, W. / Stefan, D. / Obermeier, E. / Wondrak, W.

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Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode

Reichert, W. / Stefan, D. / Obermeier, E. / Wondrak, W.

Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode

Reichert, W. / Stefan, D. / Obermeier, E. / Wondrak, W.

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Order at Subito €

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Document information

Title:

Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode

Contributors:

Reichert, W. (author) / Stefan, D. (author) / Obermeier, E. (author) / Wondrak, W. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

Published in:

High Temperature Electronics: Materials, Devices and Applications ; 190-194

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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