Purity and surface structure of thick 6H and 4H SiC layers grown by sublimation epitaxy: Fid-Bau Portal

Purity and surface structure of thick 6H and 4H SiC layers grown by sublimation epitaxy

Syvajarvi, M. / Yakimova, R. / Johansson, E.A.M. / Henry, A. / Wahab, Q. / Hallin, C. / Janzen, E.

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Purity and surface structure of thick 6H and 4H SiC layers grown by sublimation epitaxy

Syvajarvi, M. / Yakimova, R. / Johansson, E.A.M. / Henry, A. / Wahab, Q. / Hallin, C. / Janzen, E.

Purity and surface structure of thick 6H and 4H SiC layers grown by sublimation epitaxy

Syvajarvi, M. / Yakimova, R. / Johansson, E.A.M. / Henry, A. / Wahab, Q. / Hallin, C. / Janzen, E.

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Document information

Title:

Purity and surface structure of thick 6H and 4H SiC layers grown by sublimation epitaxy

Contributors:

Syvajarvi, M. (author) / Yakimova, R. (author) / Johansson, E.A.M. (author) / Henry, A. (author) / Wahab, Q. (author) / Hallin, C. (author) / Janzen, E. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 147 - 150

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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