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Properties of AlN Layers Grown by Sublimation Epitaxy

Beshkova, M. / Zakhariev, Z. / Birch, J. / Kakanakova, A. / Yakimova, R.

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Properties of AlN Layers Grown by Sublimation Epitaxy

Beshkova, M. / Zakhariev, Z. / Birch, J. / Kakanakova, A. / Yakimova, R.

Properties of AlN Layers Grown by Sublimation Epitaxy

Beshkova, M. / Zakhariev, Z. / Birch, J. / Kakanakova, A. / Yakimova, R.

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Check availability in my library

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Document information

Title:

Properties of AlN Layers Grown by Sublimation Epitaxy

Contributors:

Beshkova, M. (author) / Zakhariev, Z. (author) / Birch, J. (author) / Kakanakova, A. (author) / Yakimova, R. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 995-998

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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