Optical investigation of residual doping species in 6H and 4H-SIC layers grown by chemical vapor deposition: Fid-Bau Portal

Optical investigation of residual doping species in 6H and 4H-SIC layers grown by chemical vapor deposition

Neyret, E. / Ferro, G. / Juillaguet, S. / Bluet, J.M. / Jaussaud, C. / Camassel, J.

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Optical investigation of residual doping species in 6H and 4H-SIC layers grown by chemical vapor deposition

Neyret, E. / Ferro, G. / Juillaguet, S. / Bluet, J.M. / Jaussaud, C. / Camassel, J.

Optical investigation of residual doping species in 6H and 4H-SIC layers grown by chemical vapor deposition

Neyret, E. / Ferro, G. / Juillaguet, S. / Bluet, J.M. / Jaussaud, C. / Camassel, J.

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Document information

Title:

Optical investigation of residual doping species in 6H and 4H-SIC layers grown by chemical vapor deposition

Contributors:

Neyret, E. (author) / Ferro, G. (author) / Juillaguet, S. (author) / Bluet, J.M. (author) / Jaussaud, C. (author) / Camassel, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 253 - 257

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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