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Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
Getto, R. (author) / Freytag, J. (author) / Kopnarski, M. (author) / Oechsner, H. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 270 - 274
1999-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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