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Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
Characterization of sputtered titanium silicide ohmic contacts on n-type 6H-silicon carbide
Getto, R. (Autor:in) / Freytag, J. (Autor:in) / Kopnarski, M. (Autor:in) / Oechsner, H. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 270 - 274
01.01.1999
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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