Shallow and deep donors in transport properties of N-implanted 6H-SiC: Fid-Bau Portal

Shallow and deep donors in transport properties of N-implanted 6H-SiC

Thomas, P. / Contreras, S. / Robert, J.L. / Zawadzki, W. / Gimbert, J. / Billon, T.

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Shallow and deep donors in transport properties of N-implanted 6H-SiC

Thomas, P. / Contreras, S. / Robert, J.L. / Zawadzki, W. / Gimbert, J. / Billon, T.

Shallow and deep donors in transport properties of N-implanted 6H-SiC

Thomas, P. / Contreras, S. / Robert, J.L. / Zawadzki, W. / Gimbert, J. / Billon, T.

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Document information

Title:

Shallow and deep donors in transport properties of N-implanted 6H-SiC

Contributors:

Thomas, P. (author) / Contreras, S. (author) / Robert, J.L. (author) / Zawadzki, W. (author) / Gimbert, J. (author) / Billon, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 301 - 304

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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