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Influence of the silicon overlayer thickness of SOI unibond substrates on @b-SIC heteroepitaxy
Influence of the silicon overlayer thickness of SOI unibond substrates on @b-SIC heteroepitaxy
Influence of the silicon overlayer thickness of SOI unibond substrates on @b-SIC heteroepitaxy
Moller, H. (author) / Eickhoff, M. (author) / Vogelmeier, L. (author) / Rapp, M. (author) / Krotz, G. (author) / Papaioannou, V. (author) / Stoemenos, J. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 567 - 570
1999-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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