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    High temperature piezoresistive @b-SiC-on-SOI pressure sensor with on chip SiC thermistor

    New search for: Ziermann, R.
    New search for: von Berg, J.
    New search for: Obermeier, E.
    New search for: Wischmeyer, F.
    New search for: Niemann, E.
    New search for: Moller, H.
    New search for: Eickhoff, M.
    New search for: Krotz, G.

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    High temperature piezoresistive @b-SiC-on-SOI pressure sensor with on chip SiC thermistor

    New search for: Ziermann, R.
    New search for: von Berg, J.
    New search for: Obermeier, E.
    New search for: Wischmeyer, F.
    New search for: Niemann, E.
    New search for: Moller, H.
    New search for: Eickhoff, M.
    New search for: Krotz, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High temperature piezoresistive @b-SiC-on-SOI pressure sensor with on chip SiC thermistor

    New search for: Ziermann, R.
    New search for: von Berg, J.
    New search for: Obermeier, E.
    New search for: Wischmeyer, F.
    New search for: Niemann, E.
    New search for: Moller, H.
    New search for: Eickhoff, M.
    New search for: Krotz, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High temperature piezoresistive @b-SiC-on-SOI pressure sensor with on chip SiC thermistor

    Contributors:

    Ziermann, R. (author) / von Berg, J. (author) / Obermeier, E. (author) / Wischmeyer, F. (author) / Niemann, E. (author) / Moller, H. (author) / Eickhoff, M. (author) / Krotz, G. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 576 - 578

    Publication date:

    1999-01-01

    Size:

    3 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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