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Optimization of nitrogenated amorphous carbon films deposited by dual ion beam sputtering

Cheah, L.K. / Shi, X. / Liu, E. / Tay, B.K. / Shi, J.R.

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Optimization of nitrogenated amorphous carbon films deposited by dual ion beam sputtering

Cheah, L.K. / Shi, X. / Liu, E. / Tay, B.K. / Shi, J.R.

Optimization of nitrogenated amorphous carbon films deposited by dual ion beam sputtering

Cheah, L.K. / Shi, X. / Liu, E. / Tay, B.K. / Shi, J.R.

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Check availability in my library

Order at Subito €

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Document information

Title:

Optimization of nitrogenated amorphous carbon films deposited by dual ion beam sputtering

Contributors:

Cheah, L.K. (author) / Shi, X. (author) / Liu, E. (author) / Tay, B.K. (author) / Shi, J.R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 64 ; 6 - 11

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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