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    Self-Assembled Patterning of Ultrathin Silicides by Local Oxidation

    New search for: Mantl, S.
    New search for: Zhao, Q.-T.
    New search for: Kabius, B.

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    Self-Assembled Patterning of Ultrathin Silicides by Local Oxidation

    New search for: Mantl, S.
    New search for: Zhao, Q.-T.
    New search for: Kabius, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Self-Assembled Patterning of Ultrathin Silicides by Local Oxidation

    New search for: Mantl, S.
    New search for: Zhao, Q.-T.
    New search for: Kabius, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Self-Assembled Patterning of Ultrathin Silicides by Local Oxidation

    Contributors:

    Mantl, S. (author) / Zhao, Q.-T. (author) / Kabius, B. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 24 ; 31-35

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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