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Conductivity Properties of Phosphorus-doped Hydrogenated Nanocrystalline Silicon Film

Liu, M. / Fu, D. / Wang, Z. / Peng, Y. / He, Y.

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Conductivity Properties of Phosphorus-doped Hydrogenated Nanocrystalline Silicon Film

Liu, M. / Fu, D. / Wang, Z. / Peng, Y. / He, Y.

Conductivity Properties of Phosphorus-doped Hydrogenated Nanocrystalline Silicon Film

Liu, M. / Fu, D. / Wang, Z. / Peng, Y. / He, Y.

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Access via TIB

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Order at Subito €

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Document information

Title:

Conductivity Properties of Phosphorus-doped Hydrogenated Nanocrystalline Silicon Film

Contributors:

Liu, M. (author) / Fu, D. (author) / Wang, Z. (author) / Peng, Y. (author) / He, Y. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 15 ; 386

Publication date:

1999-01-01

Size:

386 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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