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Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Cha, C. L. / Chor, E. F. / Jia, Y. M. / Bourdillon, A. J. / Gong, H. / Pan, J. S. / Zhang, A. Q. / Tang, S. K. / Boothroyd, C. B.

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Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Cha, C. L. / Chor, E. F. / Jia, Y. M. / Bourdillon, A. J. / Gong, H. / Pan, J. S. / Zhang, A. Q. / Tang, S. K. / Boothroyd, C. B.

Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Cha, C. L. / Chor, E. F. / Jia, Y. M. / Bourdillon, A. J. / Gong, H. / Pan, J. S. / Zhang, A. Q. / Tang, S. K. / Boothroyd, C. B.

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Title:

Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Contributors:

Cha, C. L. (author) / Chor, E. F. (author) / Jia, Y. M. (author) / Bourdillon, A. J. (author) / Gong, H. (author) / Pan, J. S. (author) / Zhang, A. Q. (author) / Tang, S. K. (author) / Boothroyd, C. B. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 18 ; 1427-1432

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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