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Investigation on adsorption state of surface adsorbate on silicon wafer

Liu, Y. / Liu, N. / Cao, Y.

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Investigation on adsorption state of surface adsorbate on silicon wafer

Liu, Y. / Liu, N. / Cao, Y.

Investigation on adsorption state of surface adsorbate on silicon wafer

Liu, Y. / Liu, N. / Cao, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigation on adsorption state of surface adsorbate on silicon wafer

Contributors:

Liu, Y. (author) / Liu, N. (author) / Cao, Y. (author)

Published in:

RARE METALS -BEIJING- ENGLISH EDITION ; 18 ; 106-112

Publication date:

1999-01-01

Size:

7 pages

ISSN:

1001-0521

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669

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