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Eddy Current Microsensor for Use in Micromachine Applications
Eddy Current Microsensor for Use in Micromachine Applications
Eddy Current Microsensor for Use in Micromachine Applications
Zmood, R. B. (author) / Yu, P. L. (author)
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 9 ; 952-958
1998-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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