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Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications
Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications
Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications
CHOI, C. G. (author) / JEONG, M. Y. (author) / CHOY, T. G. (author)
JOURNAL OF MATERIALS SCIENCE ; 34 ; 6035-6040
1999-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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