A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface
Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface
Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface
Asai, K. (author) / Komachi, K. (author) / Kamei, K. (author) / Katahama, H. (author)
APPLIED SURFACE SCIENCE ; 153 ; 134-142
2000-01-01
9 pages
Article (Journal)
English
DDC:
621.35
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