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Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films (Invited paper)

Grummon, D. S.

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Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films (Invited paper)

Grummon, D. S.

Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films (Invited paper)

Grummon, D. S.

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Document information

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Document information

Title:

Fabrication, Microstructure and Stress Effects in Sputtered TiNi Thin Films (Invited paper)

Contributors:

Grummon, D. S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 327/328 ; 295-302

Publication date:

2000-01-01

Size:

8 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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