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    Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films (invited paper)

    New search for: Miyazaki, S.
    New search for: Hirano, M.
    New search for: No, V. H.

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    Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films (invited paper)

    New search for: Miyazaki, S.
    New search for: Hirano, M.
    New search for: No, V. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films (invited paper)

    New search for: Miyazaki, S.
    New search for: Hirano, M.
    New search for: No, V. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films (invited paper)

    Contributors:

    Miyazaki, S. (author) / Hirano, M. (author) / No, V. H. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 394/395 ; 467-474

    Publication date:

    2002-01-01

    Size:

    8 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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