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Preparation of copper films by metal organic chemical vapor deposition on various substrates
Preparation of copper films by metal organic chemical vapor deposition on various substrates
Preparation of copper films by metal organic chemical vapor deposition on various substrates
Cho, N. I. (author) / Sul, Y. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 72 ; 184 - 188
2000-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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