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RuO~2 films by metal-organic chemical vapor deposition

Si, J. / Desu, S. B.

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RuO~2 films by metal-organic chemical vapor deposition

Si, J. / Desu, S. B.

RuO~2 films by metal-organic chemical vapor deposition

Si, J. / Desu, S. B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

RuO~2 films by metal-organic chemical vapor deposition

Contributors:

Si, J. (author) / Desu, S. B. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 8 ; 2644

Publication date:

1993-01-01

Size:

2644 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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