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Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films
Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films
Choi, W. K. (author) / Chong, N. B. (author) / Tan, L. S. (author) / Han, L. J. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 72 ; 132 - 134
2000-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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