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    Annealing effects of tantalum thin films sputtered on [001] silicon substrate

    New search for: Liu, L.
    New search for: Gong, H.
    New search for: Wang, Y.
    New search for: Wang, J.
    New search for: Wee, A. T.
    New search for: Liu, R.

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    Annealing effects of tantalum thin films sputtered on [001] silicon substrate

    New search for: Liu, L.
    New search for: Gong, H.
    New search for: Wang, Y.
    New search for: Wang, J.
    New search for: Wee, A. T.
    New search for: Liu, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Annealing effects of tantalum thin films sputtered on [001] silicon substrate

    New search for: Liu, L.
    New search for: Gong, H.
    New search for: Wang, Y.
    New search for: Wang, J.
    New search for: Wee, A. T.
    New search for: Liu, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Annealing effects of tantalum thin films sputtered on [001] silicon substrate

    Contributors:

    Liu, L. (author) / Gong, H. (author) / Wang, Y. (author) / Wang, J. (author) / Wee, A. T. (author) / Liu, R. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 16 ; 85-89

    Publication date:

    2001-01-01

    Size:

    5 pages

    ISSN:

    0928-4931

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 660

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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