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Pre-bonding technology based on excimer laser surface treatment

Rotel, M. / Zahavi, J. / Tamir, S. / Buchman, A. / Dodiuk, H.

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Pre-bonding technology based on excimer laser surface treatment

Rotel, M. / Zahavi, J. / Tamir, S. / Buchman, A. / Dodiuk, H.

Pre-bonding technology based on excimer laser surface treatment

Rotel, M. / Zahavi, J. / Tamir, S. / Buchman, A. / Dodiuk, H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Pre-bonding technology based on excimer laser surface treatment

Contributors:

Rotel, M. (author) / Zahavi, J. (author) / Tamir, S. (author) / Buchman, A. (author) / Dodiuk, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 154-155 ; 610-616

Publication date:

2000-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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