Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation: Fid-Bau Portal

Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation

Acquaviva, S. / D'Anna, E. / De Giorgi, M. L. / Fernandez, M. / Leggieri, G. / Luches, A. / Zocco, A. / Majni, G.

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Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation

Acquaviva, S. / D'Anna, E. / De Giorgi, M. L. / Fernandez, M. / Leggieri, G. / Luches, A. / Zocco, A. / Majni, G.

Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation

Acquaviva, S. / D'Anna, E. / De Giorgi, M. L. / Fernandez, M. / Leggieri, G. / Luches, A. / Zocco, A. / Majni, G.

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Document information

Title:

Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation

Contributors:

Acquaviva, S. (author) / D'Anna, E. (author) / De Giorgi, M. L. (author) / Fernandez, M. (author) / Leggieri, G. (author) / Luches, A. (author) / Zocco, A. (author) / Majni, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 154-155 ; 369-375

Publication date:

2000-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

De Giorgi, M. L. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1998

Excimer laser reactive ablation deposition of silicon nitride films

D'Anna, E. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1995

High quality Hastelloy films deposited by XeCl pulsed laser ablation

Zocco, A. / Perrone, A. / Vignolo, M. F. et al. | British Library Online Contents | 2003

Carbon nitride films prepared by excimer laser ablation

Gonzalez, P. / Soto, R. / Parada, E. G. et al. | British Library Online Contents | 1997

Increase of efficiency for the XeCl excimer laser ablation of ceramics

Geiger, M. / Becker, W. / Rebhan, T. et al. | British Library Online Contents | 1996