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    Excimer laser reactive ablation deposition of silicon nitride films

    New search for: D'Anna, E.
    New search for: Leggieri, G.
    New search for: Luches, A.
    New search for: Martino, M.
    New search for: Dieleman, J.
    New search for: Biermann, U. K. P.
    New search for: Hess, P.

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    Excimer laser reactive ablation deposition of silicon nitride films

    New search for: D'Anna, E.
    New search for: Leggieri, G.
    New search for: Luches, A.
    New search for: Martino, M.
    New search for: Dieleman, J.
    New search for: Biermann, U. K. P.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Excimer laser reactive ablation deposition of silicon nitride films

    New search for: D'Anna, E.
    New search for: Leggieri, G.
    New search for: Luches, A.
    New search for: Martino, M.
    New search for: Dieleman, J.
    New search for: Biermann, U. K. P.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Excimer laser reactive ablation deposition of silicon nitride films

    Contributors:

    D'Anna, E. (author) / Leggieri, G. (author) / Luches, A. (author) / Martino, M. (author) / Dieleman, J. / Biermann, U. K. P. / Hess, P.

    Published in:

    Photon-Assisted Processing of Surfaces and Thin Films ; 170

    APPLIED SURFACE SCIENCE ; 86

    Publication date:

    1995-01-01

    Size:

    170 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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