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Hot-filament-enhanced chemical vapor deposition of silicon oxide films

Chavez, F. / Bravo-Garcia, Y. E. / Silva-Andrade, F. / Galindo, A.

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Hot-filament-enhanced chemical vapor deposition of silicon oxide films

Chavez, F. / Bravo-Garcia, Y. E. / Silva-Andrade, F. / Galindo, A.

Hot-filament-enhanced chemical vapor deposition of silicon oxide films

Chavez, F. / Bravo-Garcia, Y. E. / Silva-Andrade, F. / Galindo, A.

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Check availability in my library

Order at Subito €

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Document information

Title:

Hot-filament-enhanced chemical vapor deposition of silicon oxide films

Contributors:

Chavez, F. (author) / Bravo-Garcia, Y. E. (author) / Silva-Andrade, F. (author) / Galindo, A. (author)

Published in:

MATERIALS LETTERS ; 43 ; 324-328

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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