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Effect of heat transfer on the C49-C54 phase transformation in TiSi2 thin film

Lin, Z. / Latt, K. M. / Lee, Y. K.

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Effect of heat transfer on the C49-C54 phase transformation in TiSi2 thin film

Lin, Z. / Latt, K. M. / Lee, Y. K.

Effect of heat transfer on the C49-C54 phase transformation in TiSi2 thin film

Lin, Z. / Latt, K. M. / Lee, Y. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of heat transfer on the C49-C54 phase transformation in TiSi2 thin film

Contributors:

Lin, Z. (author) / Latt, K. M. (author) / Lee, Y. K. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 329-333

Publication date:

1999-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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