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    Cluster ion implantation: a molecular dynamics study

    New search for: Ihara, S.
    New search for: Itoh, S.
    New search for: Greer, J. C.

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    Cluster ion implantation: a molecular dynamics study

    New search for: Ihara, S.
    New search for: Itoh, S.
    New search for: Greer, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Cluster ion implantation: a molecular dynamics study

    New search for: Ihara, S.
    New search for: Itoh, S.
    New search for: Greer, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Cluster ion implantation: a molecular dynamics study

    Contributors:

    Ihara, S. (author) / Itoh, S. (author) / Greer, J. C. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 91-95

    Publication date:

    2000-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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