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Polishing and Surface Characterization of SiC Substrates
Polishing and Surface Characterization of SiC Substrates
Polishing and Surface Characterization of SiC Substrates
Everson, W. J. (author) / Snyder, D. W. (author) / Heydermann, V. D. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 837-840
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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