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Surface Polishing of 6H-SiC Substrates
Surface Polishing of 6H-SiC Substrates
Surface Polishing of 6H-SiC Substrates
JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 23 ; 430-432
2007-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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