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Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering

Mitchel, W. C. / Brown, J. / Buckanan, D. / Bertke, R. / Malalingham, K. / Orazio, F. D. / Pirouz, P. / Tseng, H.-J. R. / Ramabadran, U. B. / Roughani, B.

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Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering

Mitchel, W. C. / Brown, J. / Buckanan, D. / Bertke, R. / Malalingham, K. / Orazio, F. D. / Pirouz, P. / Tseng, H.-J. R. / Ramabadran, U. B. / Roughani, B.

Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering

Mitchel, W. C. / Brown, J. / Buckanan, D. / Bertke, R. / Malalingham, K. / Orazio, F. D. / Pirouz, P. / Tseng, H.-J. R. / Ramabadran, U. B. / Roughani, B.

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Title:

Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering

Contributors:

Mitchel, W. C. (author) / Brown, J. (author) / Buckanan, D. (author) / Bertke, R. (author) / Malalingham, K. (author) / Orazio, F. D. (author) / Pirouz, P. (author) / Tseng, H.-J. R. (author) / Ramabadran, U. B. (author) / Roughani, B. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 841-844

Publication date:

2000-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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