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Nuclear Transmutation Doping of Phosphorus into 6H-SiC

Tamura, S. / Kimoto, T. / Matsunami, H. / Okada, M. / Kanazawa, S. / Kimura, I.

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Nuclear Transmutation Doping of Phosphorus into 6H-SiC

Tamura, S. / Kimoto, T. / Matsunami, H. / Okada, M. / Kanazawa, S. / Kimura, I.

Nuclear Transmutation Doping of Phosphorus into 6H-SiC

Tamura, S. / Kimoto, T. / Matsunami, H. / Okada, M. / Kanazawa, S. / Kimura, I.

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Check availability in my library

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Document information

Title:

Nuclear Transmutation Doping of Phosphorus into 6H-SiC

Contributors:

Tamura, S. (author) / Kimoto, T. (author) / Matsunami, H. (author) / Okada, M. (author) / Kanazawa, S. (author) / Kimura, I. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 849-852

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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