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Channeled Implants in 6H Silicon Carbide
Channeled Implants in 6H Silicon Carbide
Channeled Implants in 6H Silicon Carbide
Janson, M. S. (author) / Hallen, A. (author) / Godignon, P. (author) / Kuznetsov, A. Y. (author) / Linnarsson, M. K. (author) / Morvan, E. (author) / Svensson, B. G. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 889-892
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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NTIS | 1978
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