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Damage Reduction in Channeled Ion Implanted 6H-SiC
Damage Reduction in Channeled Ion Implanted 6H-SiC
Damage Reduction in Channeled Ion Implanted 6H-SiC
Morvan, E. (author) / Mestres, N. (author) / Campos, F. J. (author) / Pascual, J. (author) / Hallen, A. (author) / Linnarsson, M. K. (author) / Kuznetsov, A. Y. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 893-896
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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NTIS | 1978
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