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Real-Time Assessment of Overlayer Removal on 4H-SiC Surfaces: Techniques and Relevance to Contact Formation
Real-Time Assessment of Overlayer Removal on 4H-SiC Surfaces: Techniques and Relevance to Contact Formation
Real-Time Assessment of Overlayer Removal on 4H-SiC Surfaces: Techniques and Relevance to Contact Formation
Edwards, N. V. (author) / Madsen, L. D. (author) / Robbie, K. (author) / Powell, G. D. (author) / Jarrendahl, K. (author) / Cobet, C. (author) / Esser, N. (author) / Richter, W. (author) / Aspnes, D. E. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 1033-1036
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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