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Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HT CVD Crystal Growth Developments
Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HT CVD Crystal Growth Developments
Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HT CVD Crystal Growth Developments
Ellison, A. (author) / Zhang, J. (author) / Magnusson, W. (author) / Henry, A. (author) / Wahab, Q. (author) / Bergman, J. P. (author) / Hemmingsson, C. (author) / Son, N. T. (author) / Janzen, E. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 131-136
2000-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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