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Quantified Conditions for Reduction of ESO Contamination During SiC Metalization

McDaniel, G. Y. / Fenstermaker, S. T. / Walker, D. E. / Lampert, W. V. / Mukhopadhyay, S. M. / Holloway, P. H.

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Quantified Conditions for Reduction of ESO Contamination During SiC Metalization

McDaniel, G. Y. / Fenstermaker, S. T. / Walker, D. E. / Lampert, W. V. / Mukhopadhyay, S. M. / Holloway, P. H.

Quantified Conditions for Reduction of ESO Contamination During SiC Metalization

McDaniel, G. Y. / Fenstermaker, S. T. / Walker, D. E. / Lampert, W. V. / Mukhopadhyay, S. M. / Holloway, P. H.

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Document information

Title:

Quantified Conditions for Reduction of ESO Contamination During SiC Metalization

Contributors:

McDaniel, G. Y. (author) / Fenstermaker, S. T. (author) / Walker, D. E. (author) / Lampert, W. V. (author) / Mukhopadhyay, S. M. (author) / Holloway, P. H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 407-410

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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