Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes: Fid-Bau Portal

Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

Shamsuzzoha, M. / Saddow, S. E. / Schattner, T. E. / Jin, L. / Dudley, M. / Rendakova, S. V. / Dmitriev, V. A.

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Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

Shamsuzzoha, M. / Saddow, S. E. / Schattner, T. E. / Jin, L. / Dudley, M. / Rendakova, S. V. / Dmitriev, V. A.

Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

Shamsuzzoha, M. / Saddow, S. E. / Schattner, T. E. / Jin, L. / Dudley, M. / Rendakova, S. V. / Dmitriev, V. A.

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Title:

Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

Contributors:

Shamsuzzoha, M. (author) / Saddow, S. E. (author) / Schattner, T. E. (author) / Jin, L. (author) / Dudley, M. (author) / Rendakova, S. V. (author) / Dmitriev, V. A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 453-456

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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