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A New Method of Mapping and Counting Micropipes in SiC Wafers

Wan, J. W. / Park, S. H. / Chung, G. / Carlson, E. / Loboda, M. J.

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A New Method of Mapping and Counting Micropipes in SiC Wafers

Wan, J. W. / Park, S. H. / Chung, G. / Carlson, E. / Loboda, M. J.

A New Method of Mapping and Counting Micropipes in SiC Wafers

Wan, J. W. / Park, S. H. / Chung, G. / Carlson, E. / Loboda, M. J.

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Check availability in my library

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Document information

Title:

A New Method of Mapping and Counting Micropipes in SiC Wafers

Contributors:

Wan, J. W. (author) / Park, S. H. (author) / Chung, G. (author) / Carlson, E. (author) / Loboda, M. J. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 447-450

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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