Anisotropic Dielectric Function Properties of Semi-Insulating 4H-SiC Determined from Spectroscopic Ellipsometry: Fid-Bau Portal

Anisotropic Dielectric Function Properties of Semi-Insulating 4H-SiC Determined from Spectroscopic Ellipsometry

Kildemo, M. / Mooney, M. B. / Kelly, P. V. / Sudre, C. / Crean, G. M.

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Anisotropic Dielectric Function Properties of Semi-Insulating 4H-SiC Determined from Spectroscopic Ellipsometry

Kildemo, M. / Mooney, M. B. / Kelly, P. V. / Sudre, C. / Crean, G. M.

Anisotropic Dielectric Function Properties of Semi-Insulating 4H-SiC Determined from Spectroscopic Ellipsometry

Kildemo, M. / Mooney, M. B. / Kelly, P. V. / Sudre, C. / Crean, G. M.

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Check availability in my library

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Document information

Title:

Anisotropic Dielectric Function Properties of Semi-Insulating 4H-SiC Determined from Spectroscopic Ellipsometry

Contributors:

Kildemo, M. (author) / Mooney, M. B. (author) / Kelly, P. V. (author) / Sudre, C. (author) / Crean, G. M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 571-574

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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