Confocal Raman Microprobe of Lattice Damage in N^+ Implanted 6H-SiC: Fid-Bau Portal

Confocal Raman Microprobe of Lattice Damage in N^+ Implanted 6H-SiC

Mestres, N. / Alsina, F. / Campos, F. J. / Pascual, J. / Morvan, E. / Godignon, P. / Millan, J.

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Confocal Raman Microprobe of Lattice Damage in N^+ Implanted 6H-SiC

Mestres, N. / Alsina, F. / Campos, F. J. / Pascual, J. / Morvan, E. / Godignon, P. / Millan, J.

Confocal Raman Microprobe of Lattice Damage in N^+ Implanted 6H-SiC

Mestres, N. / Alsina, F. / Campos, F. J. / Pascual, J. / Morvan, E. / Godignon, P. / Millan, J.

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Title:

Confocal Raman Microprobe of Lattice Damage in N^+ Implanted 6H-SiC

Contributors:

Mestres, N. (author) / Alsina, F. (author) / Campos, F. J. (author) / Pascual, J. (author) / Morvan, E. (author) / Godignon, P. (author) / Millan, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 663-666

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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