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    Raman microprobe analysis of strained polysilicon deposited layers

    New search for: Talaat, H.
    New search for: Negm, S.
    New search for: Schaffer, H. E.
    New search for: Adar, F.
    New search for: Nassiopoulos, A. G.

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    Raman microprobe analysis of strained polysilicon deposited layers

    New search for: Talaat, H.
    New search for: Negm, S.
    New search for: Schaffer, H. E.
    New search for: Adar, F.
    New search for: Nassiopoulos, A. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Raman microprobe analysis of strained polysilicon deposited layers

    New search for: Talaat, H.
    New search for: Negm, S.
    New search for: Schaffer, H. E.
    New search for: Adar, F.
    New search for: Nassiopoulos, A. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Raman microprobe analysis of strained polysilicon deposited layers

    Contributors:

    Talaat, H. (author) / Negm, S. (author) / Schaffer, H. E. (author) / Adar, F. (author) / Nassiopoulos, A. G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 123/124 ; 742-745

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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