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Theoretical evaluation of film growth rate during atomic layer epitaxy

Park, H. S. / Min, J. S. / Lim, J. W. / Kang, S. W.

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Theoretical evaluation of film growth rate during atomic layer epitaxy

Park, H. S. / Min, J. S. / Lim, J. W. / Kang, S. W.

Theoretical evaluation of film growth rate during atomic layer epitaxy

Park, H. S. / Min, J. S. / Lim, J. W. / Kang, S. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Theoretical evaluation of film growth rate during atomic layer epitaxy

Contributors:

Park, H. S. (author) / Min, J. S. (author) / Lim, J. W. (author) / Kang, S. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 158 ; 81-91

Publication date:

2000-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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